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Dry Vacuum Pump×樫山工業 - List of Manufacturers, Suppliers, Companies and Products

Dry Vacuum Pump Product List

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Dry Vacuum Pump "MU-XE Series"

Dry Vacuum Pump "MU-XE Series"

Achieving the world's smallest class size and power simultaneously! Can be integrated into all types of manufacturing equipment.

The "MU-XE Series" is a roots-type dry vacuum pump that achieves the world's best energy efficiency and footprint in its class. It can be integrated into various manufacturing equipment and is ideal for clean exhaust process applications such as load locks and transport chambers. 【Specifications】 ■ Power consumption: 0.25 kW ■ Size: 230×450 mm (A3 or smaller) *For more details, please refer to the PDF document or feel free to contact us.

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Dry vacuum pump "SDE series"

Dry vacuum pump "SDE series"

High-durability dry vacuum pump suitable for all processes! Specialized for process performance.

The "SDE Series" is a dry vacuum pump from Kashiyama Industry, which has gained high trust in a wide range of fields, including semiconductor and liquid crystal manufacturing. It employs a vertical screw with excellent anti-deposition performance, demonstrating high corrosion resistance due to structural materials and temperature settings. The unique screw design achieves energy savings. 【Examples of Compatible Processes】 ■ Metal-Etch ■ SA-CVD ■ Metal-CVD ■ PE-CVD ■ LP-CVD ■ ALD *For more details, please refer to the PDF document or feel free to contact us.

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Dry vacuum pump "SDL Series"

Dry vacuum pump "SDL Series"

Large displacement pumps that accommodate the increase in diameter of wafers and FPDs.

The "SDL Series" is a dry vacuum pump from Kashiyama Industries, which has gained high trust in a wide range of fields, including semiconductor and LCD manufacturing. It accommodates the increasing size of wafers and FPDs. By combining units, it can achieve a large exhaust capacity, meeting requests for over 150,000 L/min. Furthermore, by ensuring exhaust speed on the atmospheric side, it shortens the cycle time through rapid exhaust of large load lock chambers. There is also a solvent exhaust specification available, so please inquire for details. 【Features】 ■ Accommodates the increasing size of wafers and FPDs ■ Shortens cycle time *For more details, please refer to the PDF materials or feel free to contact us.

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Dry vacuum pump "MU-PE/HE series"

Dry vacuum pump "MU-PE/HE series"

Not just energy-saving - Usable for a wide range of applications from light loads to etching.

The "MU-PE/HE Series" is a roots-type dry vacuum pump that can be used for a wide range of applications, from light loads to etching. The MU-HE series features HOT-N2 purging (optional). 【Specifications】 ■ Process resistance ■ Power consumption: 0.6 kW *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum pump
  • Vacuum Equipment

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